Thinning /
Backgrinding
Chip Supply often has customers that ask for their die to be
thinned. This requirement is most common from customers building
modules or very slim packages and have a need for the smallest
possible "z" axis. Some examples are smart card systems, wireless
devices and medical implants.
Wafer thinning is used with various types of compound
semiconductors, but the most common material it is applied to is
silicon. It takes the careful handling of an experienced technician
to ensure that the wafers are not overstressed where cracking and
splintering may occur. To de-stress the wafer after thinning it is
sent through a polishing process where inconsistencies and
imperfections on the back surface are eliminated.
During the thinning process the active side of the wafer is mounted
on a specialized adhesive tape. This is to protect it from the
abrasive slurry, a combination of lapping oil and silicon carbide
or aluminum oxide, used to thin the wafer. Using a high-precision
polishing machine the wafer is mounted so that it can be thinned to
the desired thickness, polished and cleansed. Upon completion of
this process the wafer is carefully removed from the protective
tape and can be processed into the form factor the customer
needs.
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